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HVAC for Semiconductor FAB & Exhaust Management

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Preface
HVAC stands for (Heating, Ventilation & Air Conditioning)

This book is about HVAC applications of Semiconductor Plants & How they require large amounts of exhaust due to all the chemicals used in manufacturing silicon wafers.

I will simplify this book as much as possible to be understood by non HVAC literate professionals or beginners in the HVAC industry.
#hvac #semiconductor
You will get a PDF (6MB) file